الفهرس 
Fabrication and optical properties of one-dimensional silicon-based photonic crystal microcavity
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Abstract
A novel silicon-based optical microcavity composed of a defect layer sandwiched between two parallel rugate mirrors is created by the electrochemical anodization of silicon in hydrofluoric acid (HF)-based electrolyte using a precisely controlled current density profile. The spectral response of the rugate-based microcavity is simulated and compared to the conventional microcavities. The stabilization of the prepared microcavity against natural oxidation is performed using two different novel approaches. The former approach involves thermal oxidation of the microcavity, whereas the later approach employs the atomic layer deposition (ALD) technique to cover the pore wall with different protective layers. The spectral response of the microcavity shows a remarkable sensitivity to each stabilization method