الفهرس | Only 14 pages are availabe for public view |
Abstract Micro-Electro Mechanical Systems (MEMS) encompass the processbased technologies used to fabricate tiny integrated devices and/or systems that integrate functionalities from different physical domains into one device. Such devices are fabricated using a wide range of technologies, having in common the ability to create structures with micro- and even nanometer accuracies. The products range in size from a few micrometers to millimeters. These devices (or systems) have the ability to sense, control and actuate. The purpose of this thesis is to present the analysis and design of both pressure and microphone sensors. Pressure and microphone sensors represent the greatest successes of the micromachining technology. Pressure sensors are used in automobiles, robotics, space, process industries, cooling applications for VLSI applications and also for biomedical applications. Also, Microphone optimization for photoacoustic signal detection has become an attractive and realistic goal with MEMS based devices. The Polysilicon material is used for MEMS pressure and microphone sensors because of its highest sensitivity to strain changes. Analytical formulation is conducted and the results are compared with the published experimental work and good agreement is obtained. In this thesis, the analysis of MEMS based pressure and microphone sensors are carried out using MATLAB software. MATLAB environment is employed to model CNT MEMS sensors and accurate models are devised to study their performance. The proposed models allow handling different parameters affecting the performance of these sensors. Also, the Finite Element Analysis methodology is conducted and comparative analysis of the two different shaped diaphragms (circular and square) piezoresistive pressure sensors is presented. |